Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5355223 | Apparatus for detecting a surface position | — | 1994-10-11 |
| 5347356 | Substrate aligning device using interference light generated by two beams irradiating diffraction grating | Kazuya Ota, Hideo Mizutani, Kouichiro Komatsu | 1994-09-13 |
| 5343270 | Projection exposure apparatus | Yasuyuki Sakakibara, Susumu Makinouchi, Naomasa Shiraishi | 1994-08-30 |
| 5289231 | Apparatus for manufacturing disc medium | Hiromitsu Iwata, Junichi Morino, Toru Kiuchi | 1994-02-22 |