Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5347356 | Substrate aligning device using interference light generated by two beams irradiating diffraction grating | Nobutaka Magome, Hideo Mizutani, Kouichiro Komatsu | 1994-09-13 |