Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5305366 | Thin film forming apparatus | Takehiko Nakahara, Masao Koshinaka, Nobuyuki Kosaka | 1994-04-19 |
| 5289260 | Pattern defect detection device and a spatial frequency filter used therein | Yoko Miyazaki, Hitoshi Tanaka, Nobuyuki Kosaka, Toyomi Ohshige | 1994-02-22 |