Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5317618 | Light transmission type vacuum separating window and soft X-ray transmitting window | Takehiko Nakahara, Masao Koshinaka | 1994-05-31 |
| 5305366 | Thin film forming apparatus | Takehiko Nakahara, Masao Koshinaka, Toshimasa Tomoda | 1994-04-19 |
| 5289260 | Pattern defect detection device and a spatial frequency filter used therein | Yoko Miyazaki, Toshimasa Tomoda, Hitoshi Tanaka, Toyomi Ohshige | 1994-02-22 |