Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5318654 | Apparatus for cleaning a substrate with metastable helium | Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida, Kenji Kawai | 1994-06-07 |
TM
Takahiro Maruyama
Overall (1994): #63,041 of 165,921Top 40%
1
Patents 1994