Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5318654 | Apparatus for cleaning a substrate with metastable helium | Takahiro Maruyama, Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida | 1994-06-07 |
| 5306671 | Method of treating semiconductor substrate surface and method of manufacturing semiconductor device including such treating method | Toshiaki Ogawa, Hiroshi Morita, Tomoaki Ishida, Moriaki Akazawa | 1994-04-26 |