Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362353 | Faraday cage for barrel-style plasma etchers | — | 1994-11-08 |
| 5310455 | Techniques for assembling polishing pads for chemi-mechanical polishing of silicon wafers | Nicholas F. Pasch, Mark Franklin | 1994-05-10 |
| 5278103 | Method for the controlled formation of voids in doped glass dielectric films | Chi-Yi Kao, Wei-Jen Hsia, Atsushi Shimoda | 1994-01-11 |