Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5278103 | Method for the controlled formation of voids in doped glass dielectric films | Thomas G. Mallon, Wei-Jen Hsia, Atsushi Shimoda | 1994-01-11 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5278103 | Method for the controlled formation of voids in doped glass dielectric films | Thomas G. Mallon, Wei-Jen Hsia, Atsushi Shimoda | 1994-01-11 |