Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348587 | Apparatus for elimination of low temperature ammonia salts in TiCl.sub.4 NH.sub.3 CVD reaction | Eric C. Eichman, Bruce A. Sommer, Michael J. Churley | 1994-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348587 | Apparatus for elimination of low temperature ammonia salts in TiCl.sub.4 NH.sub.3 CVD reaction | Eric C. Eichman, Bruce A. Sommer, Michael J. Churley | 1994-09-20 |