Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5348587 | Apparatus for elimination of low temperature ammonia salts in TiCl.sub.4 NH.sub.3 CVD reaction | Eric C. Eichman, Michael J. Churley, W. Chuck Ramsey | 1994-09-20 |
| 5308655 | Processing for forming low resistivity titanium nitride films | Eric C. Eichman, Michael J. Churley | 1994-05-03 |
| 5279857 | Process for forming low resistivity titanium nitride films | Eric C. Eichman, Michael J. Churley | 1994-01-18 |