Issued Patents 1994
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5363867 | Article storage house in a clean room | Hitoshi Kawano, Atsushi Okuno, Masanori Tsuda, Mitsuhiro Hayashi, Masanao Murata +3 more | 1994-11-15 |
| 5332013 | Unmanned conveying device in clean room | Masanao Sugita, Hitoshi Kawano | 1994-07-26 |
| 5320218 | Closed container to be used in a clean room | Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano, Atsushi Okuno +2 more | 1994-06-14 |
| 5303482 | Wafer airtight keeping unit and keeping facility thereof | Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano, Atsushi Okuno +3 more | 1994-04-19 |