Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5363867 | Article storage house in a clean room | Hitoshi Kawano, Masanori Tsuda, Mitsuhiro Hayashi, Teppei Yamashita, Masanao Murata +3 more | 1994-11-15 |
| 5320218 | Closed container to be used in a clean room | Teppei Yamashita, Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano +2 more | 1994-06-14 |
| 5303482 | Wafer airtight keeping unit and keeping facility thereof | Teppei Yamashita, Masanao Murata, Tsuyoshi Tanaka, Teruya Morita, Hitoshi Kawano +3 more | 1994-04-19 |