Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5338818 | Silicon containing positive resist for DUV lithography | Premlatha Jagannathan, Steve S. Miura, Melvin Montgomery, Harbans S. Sachdev, Ratnam Sooriyakumaran | 1994-08-16 |