Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362599 | Fast diazoquinone positive resists comprising mixed esters of 4-sulfonate and 5-sulfonate compounds | Christopher J. Knors, Steve S. Miura, Wayne M. Moreau, Randolph J. Smith | 1994-11-08 |
| 5338818 | Silicon containing positive resist for DUV lithography | William R. Brunsvold, Premlatha Jagannathan, Steve S. Miura, Harbans S. Sachdev, Ratnam Sooriyakumaran | 1994-08-16 |