Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304278 | Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity | Johann W. Bartha, Thomas Bayer, Johann Greschner, Dieter Kern, Volker Mattern | 1994-04-19 |
| 5296091 | Method of etching substrates having a low thermal conductivity | Johann W. Bartha, Thomas Bayer, Johann Greschner, Dieter Kern, Volker Mattern | 1994-03-22 |