Issued Patents 1994
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304278 | Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity | Johann W. Bartha, Thomas Bayer, Dieter Kern, Volker Mattern, Roland Stoehr | 1994-04-19 |
| 5296091 | Method of etching substrates having a low thermal conductivity | Johann W. Bartha, Thomas Bayer, Dieter Kern, Volker Mattern, Roland Stoehr | 1994-03-22 |
| 5282924 | Micromechanical sensor fabrication process | Thomas Bayer | 1994-02-01 |
| 5283107 | Modular multilayer interwiring structure | Thomas Bayer, Willy Hildenbrand, Bernd Marquart, Roland Stohr, Olaf Wolter | 1994-02-01 |
| 5283437 | Pneumatically and electrostatically driven scanning tunneling microscope | Martin Nonnenmacher, deceased, Olaf Wolter | 1994-02-01 |