Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5331191 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1994-07-19 |
| 5290993 | Microwave plasma processing device | Tetsunori Kaji, Takashi Fujii, Motohiko Yoshigai, Masaharu Nishiumi | 1994-03-01 |
| 5276386 | Microwave plasma generating method and apparatus | Seiichi Watanabe, Makoto Nawata, Ryooji Fukuyama, Yutaka Kakehi, Saburo Kanai | 1994-01-04 |