Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5290993 | Microwave plasma processing device | Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki, Masaharu Nishiumi | 1994-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5290993 | Microwave plasma processing device | Takashi Fujii, Motohiko Yoshigai, Yoshinao Kawasaki, Masaharu Nishiumi | 1994-03-01 |