Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5284179 | Valve and semiconductor fabricating equipment using the same | Mitsuhiro Shikida, Kazuo Sato, Yoshio Kawamura, Shinji Tanaka, Akira Koide +1 more | 1994-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5284179 | Valve and semiconductor fabricating equipment using the same | Mitsuhiro Shikida, Kazuo Sato, Yoshio Kawamura, Shinji Tanaka, Akira Koide +1 more | 1994-02-08 |