Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5367429 | Electrostatic type micro transducer and control system using the same | Shigeki Tsuchitani, Seiko Suzuki, Satoshi Shimada, Masayuki Miki, Masahiro Matsumoto +3 more | 1994-11-22 |
| 5284179 | Valve and semiconductor fabricating equipment using the same | Mitsuhiro Shikida, Kazuo Sato, Yoshio Kawamura, Shinji Tanaka, Yasuaki Horiuchi +1 more | 1994-02-08 |