Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304277 | Plasma processing apparatus using plasma produced by microwaves | Kazuhiro Ohara, Ichirou Sasaki | 1994-04-19 |
| 5275977 | Insulating film forming method for semiconductor device interconnection | Yasuhiro Yamaguchi | 1994-01-04 |