Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304277 | Plasma processing apparatus using plasma produced by microwaves | Kazuhiro Ohara, Toru Otsubo | 1994-04-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5304277 | Plasma processing apparatus using plasma produced by microwaves | Kazuhiro Ohara, Toru Otsubo | 1994-04-19 |