Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5328873 | Process for forming deposited film by use of alkyl aluminum hydride | Kazuo Tsubouchi, Kazuya Masu | 1994-07-12 |
| 5316972 | Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device | Kazuo Tsubouchi, Kazuya Masu | 1994-05-31 |