Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5364664 | Process for non-selectively forming deposition film on a non-electron-donative surface | Kazuya Masu | 1994-11-15 |
| 5328873 | Process for forming deposited film by use of alkyl aluminum hydride | Nobuo Mikoshiba, Kazuya Masu | 1994-07-12 |
| 5316972 | Process for forming deposited film by use of alkyl aluminum hydride and process for preparing semiconductor device | Nobuo Mikoshiba, Kazuya Masu | 1994-05-31 |