Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5368989 | Photolithographic article utilizing polymers with light-absorbing properties for anti-reflective coating | Tony D. Flaim, Kimberly A. Moeckli, Terry Brewer | 1994-11-29 |
| 5362608 | Microlithographic substrate cleaning and compositions therefor | Tony D. Flaim, Terry Brewer | 1994-11-08 |
| 5281690 | Base-soluble polyimide release layers for use in microlithographic processing | Tony D. Flaim, Gregg Barnes, Terry Brewer | 1994-01-25 |