Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5322567 | Particulate reduction baffle with wafer catcher for chemical-vapor-deposition apparatus | Paul Deaton, James V. Rinnovatore | 1994-06-21 |
| 5316794 | Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure | David K. Carlson | 1994-05-31 |
| 5298107 | Processing method for growing thick films | Lance A. Scudder, Jon M. Schalla | 1994-03-29 |