Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5374159 | Robotically loaded epitaxial deposition apparatus | David W. Severns, Brian Tompson, Paul R. Lindstrom | 1994-12-20 |
| 5316794 | Method for servicing vacuum chamber using non-reactive gas-filled maintenance enclosure | Norma Riley | 1994-05-31 |