Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5292399 | Plasma etching apparatus with conductive means for inhibiting arcing | Terrance Y. Lee, Fred C. Redeker, Petru N. Nitescu, Robert Steger, David W. Groechel +2 more | 1994-03-08 |