Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362328 | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem | Peter C. Van Buskirk, Peter S. Kirlin | 1994-11-08 |
| 5337651 | Apparatus and method for protection of pumps used for delivery of air- or moisture-sensitive liquids | Peter S. Kirlin | 1994-08-16 |
| 5280012 | Method of forming a superconducting oxide layer by MOCVD | Peter S. Kirlin, Duncan W. Brown | 1994-01-18 |