Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362328 | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem | Robin A. Gardiner, Peter S. Kirlin | 1994-11-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5362328 | Apparatus and method for delivering reagents in vapor form to a CVD reactor, incorporating a cleaning subsystem | Robin A. Gardiner, Peter S. Kirlin | 1994-11-08 |