Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4856456 | Apparatus and method for the fluid treatment of a workpiece | Gary Hillman, Bernard H. Paulfus | 1989-08-15 |
| 4852516 | Modular processing apparatus for processing semiconductor wafers | Benjamin J. Petrone, Richard C. Heim, Scott M. Pawenski | 1989-08-01 |