Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4852516 | Modular processing apparatus for processing semiconductor wafers | Richard Rubin, Richard C. Heim, Scott M. Pawenski | 1989-08-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4852516 | Modular processing apparatus for processing semiconductor wafers | Richard Rubin, Richard C. Heim, Scott M. Pawenski | 1989-08-01 |