Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4885075 | Cooling device for a sputter target and source | — | 1989-12-05 |
| 4856456 | Apparatus and method for the fluid treatment of a workpiece | Richard Rubin, Bernard H. Paulfus | 1989-08-15 |