Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4820621 | Developer solution for positive-working photoresist compositions comprising a base and a non-ionic surfactant | Yoshiyuki Sato, Hidekatsu Kohara, Toshimasa Nakayama | 1989-04-11 |