Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4870289 | Apparatus for controlling relation in position between a photomask and a wafer | Takeo Sato, Shinichiro Aoki, Katsumasa Yamaguchi, Tadashi Kaneko, Noboru Nomura +1 more | 1989-09-26 |
| 4828392 | Exposure apparatus | Noboru Nomura, Takayoshi Matsumura, Midori Yamaguchi | 1989-05-09 |