Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4870289 | Apparatus for controlling relation in position between a photomask and a wafer | Takeo Sato, Katsumasa Yamaguchi, Tadashi Kaneko, Noboru Nomura, Keisuke Koga +1 more | 1989-09-26 |