Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4870289 | Apparatus for controlling relation in position between a photomask and a wafer | Shinichiro Aoki, Katsumasa Yamaguchi, Tadashi Kaneko, Noboru Nomura, Keisuke Koga +1 more | 1989-09-26 |
| 4861148 | Projection optical system for use in precise copy | Nobuhiro Araki, Koichi Kawata, Noboru Nomura, Atushi Ueno, Shotaro Yoshida | 1989-08-29 |
| 4844568 | Scanning type projection exposure system | Masaki Suzuki, Hiroyuki Nagano, Toshiyuki Watanabe | 1989-07-04 |