Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4887282 | Method and apparatus for changing the imaging scale in X-ray lithograph | — | 1989-12-12 |
| 4856037 | Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment | Hans Betz, Wilhelm Vach, Johann Krenner | 1989-08-08 |
| 4825086 | Apparatus for the exact mutual alignment of a mask and semiconductor wafer in a lithographic apparatus | — | 1989-04-25 |