Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4856037 | Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment | Karl-Heinz Mueller, Hans Betz, Wilhelm Vach | 1989-08-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4856037 | Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment | Karl-Heinz Mueller, Hans Betz, Wilhelm Vach | 1989-08-08 |