Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4856037 | Arrangement for exposing semiconductor wafers by means of a synchrotron radiation in lithographic equipment | Karl-Heinz Mueller, Wilhelm Vach, Johann Krenner | 1989-08-08 |
| 4838694 | Process for imaging laserinterferometry and a laserinterferometer for carrying out said process | Herman Mader, Joachim Pelka | 1989-06-13 |