Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4889998 | Apparatus with four light detectors for checking surface of mask with pellicle | Fuminori Hayano, Kazunori Imamura, Kinya Kato | 1989-12-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4889998 | Apparatus with four light detectors for checking surface of mask with pellicle | Fuminori Hayano, Kazunori Imamura, Kinya Kato | 1989-12-26 |