Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4889998 | Apparatus with four light detectors for checking surface of mask with pellicle | Fuminori Hayano, Sunao Murata, Kinya Kato | 1989-12-26 |
| 4833051 | Protective device for photographic masks | — | 1989-05-23 |
| 4803373 | Conveyor arm apparatus with gap detection | Fuminori Hayano, Yukio Kakizaki, Jiro Kobayashi | 1989-02-07 |