Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4889998 | Apparatus with four light detectors for checking surface of mask with pellicle | Kazunori Imamura, Sunao Murata, Kinya Kato | 1989-12-26 |
| 4803373 | Conveyor arm apparatus with gap detection | Kazunori Imamura, Yukio Kakizaki, Jiro Kobayashi | 1989-02-07 |