Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4862008 | Method and apparatus for optical alignment of semiconductor by using a hologram | Naoto Nakashima, Yasuhiro Yoshitake | 1989-08-29 |
| 4819033 | Illumination apparatus for exposure | Yasuhiro Yoshitake, Masataka Shiba, Naoto Nakashima | 1989-04-04 |
| 4795261 | Reduction projection type aligner | Toshihiko Nakata, Masataka Shiba | 1989-01-03 |