Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4862008 | Method and apparatus for optical alignment of semiconductor by using a hologram | Yoshitada Oshida, Yasuhiro Yoshitake | 1989-08-29 |
| 4819033 | Illumination apparatus for exposure | Yasuhiro Yoshitake, Yoshitada Oshida, Masataka Shiba | 1989-04-04 |