Issued Patents 1989
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4819033 | Illumination apparatus for exposure | Yasuhiro Yoshitake, Yoshitada Oshida, Naoto Nakashima | 1989-04-04 |
| 4795261 | Reduction projection type aligner | Toshihiko Nakata, Yoshitada Oshida | 1989-01-03 |