Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4869999 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Norio Hasegawa, Toshihiko Tanaka | 1989-09-26 |
| 4857744 | Optical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical system | Keiji Kataoka, Seiji Yonezawa, Soichi Katagiri | 1989-08-15 |
| 4798470 | Pattern printing method and apparatus | Shigeo Moriyama, Tsuneo Terasawa, Shinji Okazaki, Yoshio Kawamura | 1989-01-17 |