Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4857744 | Optical projection printing apparatus wherein wafer mark has a grating pitch in the sagittal plane of the first optical system | Keiji Kataoka, Toshiei Kurosaki, Seiji Yonezawa | 1989-08-15 |