Issued Patents 1989
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4882289 | Method of making a semiconductor memory device with recessed array region | Noboru Moriuchi, Yoshiki Yamaguchi, Toshihiko Tanaka, Yoshifumi Kawamoto, Shin Kimura +2 more | 1989-11-21 |
| 4869999 | Method of forming pattern and projection aligner for carrying out the same | Hiroshi Fukuda, Toshihiko Tanaka, Toshiei Kurosaki | 1989-09-26 |
| 4835089 | Resist pattern forming process with dry etching | Takao Iwayanagi, Toshihiko Tanaka, Hiroshi Shiraishi, Takumi Ueno, Michiaki Hashimoto +2 more | 1989-05-30 |