Issued Patents 1989
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4835089 | Resist pattern forming process with dry etching | Norio Hasegawa, Toshihiko Tanaka, Hiroshi Shiraishi, Takumi Ueno, Michiaki Hashimoto +2 more | 1989-05-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4835089 | Resist pattern forming process with dry etching | Norio Hasegawa, Toshihiko Tanaka, Hiroshi Shiraishi, Takumi Ueno, Michiaki Hashimoto +2 more | 1989-05-30 |